3M™ Liqui-Cel™ Membrane Contactors for microelectronics and semiconductor

As semiconductor processing, flat panel display manufacturing and other high-technology industries move to smaller line widths, larger wafer sizes and advancing display technology, dissolved gas control is a critical consideration within the production of quality ultra-pure water for semiconductor and microelectronics.

Due to their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are considered the benchmark in degassing technology within semiconductor and flat panel display process water treatment systems. Membrane contactors have low extractables and do not negatively impact water quality. With proper system design, they can remove O₂ from water down to less than 1 ppb and dissolved CO₂ dissolved to 0.5 ppm. Low dissolved oxygen levels protect product yields, while low CO₂ levels may help maximise the efficiency of electrodionization (EDI) and other ion exchange processes.

Unlike conventional vacuum towers membrane contactor systems can be expanded. As water volume requirements grow, or dissolved gas specifications get lower, additional contactors can be added to a system to meet changing needs.

3M™ Liqui-Cel™ Membrane Contactors also enable low concentrations and precision control of dissolved gases in ultra-pure water and other compatible wet bench processes fluids.